Microfluidics and bio-MEMS at makerspace

As a semiconductor/microelectronics engineer, I realized we could possibly use the vinly cutter to create mask patterns to etch micro-fluidic channels into silicon wafers. With our current wetlab, lots of possibilities are coming. Will be covered in my Semiconductor and Microelectronics class! Will continue to work on process development!

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Iā€™m not certain what microfluidics actually are used for but Ben Krasnow has 3d printed some with the Form2 SLA Printer. Which is one of the printers in 3d fab.

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where in the video is the part pertaining to microfluidics?

About 3 minutes in ā€¦

This should be a direct link to it

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cool thanks, interesting stuff

Microfluidics development, will start a DOE with KOH and Temperature to find the best compromise between etch rate and the vinyl mask delamination.

Learned the basics of semiconductor and microelectronic processing as well as used the electronics microscope to take some micrographs of industry wafers and started work on a DOE for KOH etching with vinyl masks at Makerspace! Microfluidics and other possible MEMS devices in the future at DMS, maybe diodes with PSG.

Looks like the vinyl masking method has some possibility. The vinyl did mostly mask the wafer, at one point the temperature got too hot around 100C and started to char the vinyl and it stopped adhering. If we keep the temperature low like 50-70C should be a good way pattern and etch silicon at DMS. Exciting!

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